First by rotating the vacuum pump to pump 10-2Pa diffusion pump oil is heated to boiling at high speed from the jet of oil and steam flow continuously to the system of gas molecules brought to the side of the pump bulb at the arm assembly to be gas density Mechanical vacuum pump working range and was withdrawn to gradually obtain a high vacuum.
Diffusion pump oil in the pump structure and without leakage under the premise of the oil diffusion pump suction characteristics and ultimate vacuum pump oil mainly depends on the performance. Many types of pump oil, the table for several types of major pump oil and its characteristics.
Diffusion pump oil is heated by the electric furnace, the oil vapor generated along the diversion tube through the umbrella nozzle to the bottom of the spray. Because of the vacuum (Pa) provided by the mechanical pump on the outside of the nozzle, the oil vapor stream can be ejected for a long distance to form a jet that moves toward the air outlet. Jet finally hit by the cooling water cooling pump wall condenses into liquid flow back to the evaporator, that is, by the oil evaporation jet condensation cycle to achieve exhaust. The gas molecules entering the pump from the air inlet drop down into the vapor stream and then get downward momentum. Since the jet has a high flow rate (about 200 m / s), a high vapor density, and a large molecular weight of the diffusion pump oil (300 to 500), gas molecules can be effectively taken away. Gas molecules are taken to the exit and then pumped by a mechanical pump.
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